Assignee
PARK HYUNG-SANG
KR·3 granted patents·2 pending applications·350 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0197US8092606B2Deposition apparatusPARK HYUNG SANG·Filed 2008·Granted Jan 10, 2012·345 cites·19 claims
- 0278US8747948B2Deposition apparatusPARK HYUNG SANG·Filed 2012·Granted Jun 10, 2014·1 cites·10 claims
- 0376US8502391B2Semiconductor device and method of making single layer substrate with asymmetrical fibers and reduced warpagePARK HYUNG SANG·Filed 2011·Granted Aug 6, 2013·4 cites·25 claims
- 0450US2007215036A1Method and apparatus of time and space co-divided atomic layer depositionPARK HYUNG-SANG·Filed 2006·Application pending·0 cites
- 0548US2006177601A1Method of forming a ruthenium thin film using a plasma enhanced atomic layer deposition apparatus and the method thereofPARK HYUNG-SANG·Filed 2005·Application pending·0 cites
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