Assignee
PARK SANG-WUK
KR·3 granted patents·1 citations·filing 2010–2015
Top patents by PatentIndex Score
3 records- 0158US8872059B2Etching system and method of controlling etching process conditionPARK SANG-WUK·Filed 2011·Granted Oct 28, 2014·1 cites·20 claims
- 0234US10192881B2Semiconductor devicePARK SANG WUK·Filed 2015·Granted Jan 29, 2019·0 cites·16 claims
- 0334US8304264B2Apparatus and method for monitoring chamber status in semiconductor fabrication processPARK SANG-WUK·Filed 2010·Granted Nov 6, 2012·0 cites·13 claims
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