Assignee

PARK SCIENT INSTR CORP

US·1 granted patent·114 citations·filing 1993–1993

Technology mixB82Y1 G01Q1 Y10S1

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0191US5444244APiezoresistive cantilever with integral tip for scanning probe microscopePARK SCIENT INSTR CORP·Filed 1993·Granted Aug 22, 1995·114 cites·19 claims

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