Assignee
PARKHE VIJAY D
US·5 granted patents·53 citations·filing 2010–2013
Top patents by PatentIndex Score
5 records- 0195US9196514B2Electrostatic chuck with variable pixilated heatingPARKHE VIJAY D·Filed 2013·Granted Nov 24, 2015·28 cites·20 claims
- 0292US8852348B2Heat exchange pedestal with coating of diamond-like materialPARKHE VIJAY D·Filed 2010·Granted Oct 7, 2014·15 cites·23 claims
- 0383US9969022B2Vacuum process chamber component and methods of makingPARKHE VIJAY D·Filed 2010·Granted May 15, 2018·5 cites·22 claims
- 0476US9520315B2Electrostatic chuck with internal flow adjustments for improved temperature distributionPARKHE VIJAY D·Filed 2013·Granted Dec 13, 2016·3 cites·20 claims
- 0571US8114477B2Cleaning of a substrate supportPARKHE VIJAY D·Filed 2010·Granted Feb 14, 2012·2 cites·28 claims
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