Assignee

PARTICLE SOLUTIONS

2 granted patents·36 citations·filing 1992–1992

Technology mixC23C1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0152US5306345ADeposition chamber for deposition of particles on semiconductor wafersPARTICLE SOLUTIONS·Filed 1992·Granted Apr 26, 1994·30 cites·18 claims
0242USD350942SSemiconductor wafer supportPARTICLE SOLUTIONS·Filed 1992·Granted Sep 27, 1994·6 cites·1 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →