Assignee
PARTLO WILLIAM N
US·5 granted patents·65 citations·filing 2004–2011
Top patents by PatentIndex Score
5 records- 0195US8653437B2EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periodsPARTLO WILLIAM N·Filed 2011·Granted Feb 18, 2014·20 cites·21 claims
- 0291US8575575B2System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirrorPARTLO WILLIAM N·Filed 2010·Granted Nov 5, 2013·5 cites·21 claims
- 0390US8653491B2System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light outputPARTLO WILLIAM N·Filed 2010·Granted Feb 18, 2014·17 cites·19 claims
- 0477US8283643B2Systems and methods for drive laser beam delivery in an EUV light sourcePARTLO WILLIAM N·Filed 2009·Granted Oct 9, 2012·12 cites·28 claims
- 0567US8075732B2EUV collector debris managementPARTLO WILLIAM N·Filed 2004·Granted Dec 13, 2011·11 cites·21 claims
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