Assignee
PATRA MICHAEL
DE·4 granted patents·9 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0188US9046786B2Illumination system of a microlithographic projection exposure apparatusPATRA MICHAEL·Filed 2012·Granted Jun 2, 2015·5 cites·19 claims
- 0267US8593645B2Microlithographic projection exposure apparatus and related methodPATRA MICHAEL·Filed 2011·Granted Nov 26, 2013·2 cites·20 claims
- 0366US8724080B2Optical raster element, optical integrator and illumination system of a microlithographic projection exposure apparatusPATRA MICHAEL·Filed 2011·Granted May 13, 2014·1 cites·8 claims
- 0458US8896816B2Projection exposure method, projection exposure apparatus, laser radiation source and bandwidth narrowing module for a laser radiation sourcePATRA MICHAEL·Filed 2011·Granted Nov 25, 2014·1 cites·19 claims
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