Assignee
PERKIN ELMER CENSOR
LI·5 granted patents·165 citations·filing 1983–1985
Technology mixG03F5
Top patents by PatentIndex Score
5 records- 0196US4540277ADevice for the projection printing of masks into a workpiecePERKIN ELMER CENSOR·Filed 1983·Granted Sep 10, 1985·139 cites·7 claims
- 0255US4592648ADevice for projection copying of masks onto a workpiecePERKIN ELMER CENSOR·Filed 1985·Granted Jun 3, 1986·12 cites·5 claims
- 0340US4621922ADevice for the projection copying of masks onto a workpiecePERKIN ELMER CENSOR·Filed 1984·Granted Nov 11, 1986·6 cites·16 claims
- 0439US4592650AApparatus for projecting a pattern on a semiconductor substratePERKIN ELMER CENSOR·Filed 1985·Granted Jun 3, 1986·5 cites·10 claims
- 0532US4619524ADevice for the projection copying of masksPERKIN ELMER CENSOR·Filed 1984·Granted Oct 28, 1986·3 cites·9 claims
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