Assignee
PERLITZ SASCHA
DE·2 granted patents·5 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0170US9213003B2Method for characterizing a structure on a mask and device for carrying out said methodPERLITZ SASCHA·Filed 2011·Granted Dec 15, 2015·2 cites·23 claims
- 0268US9297994B2Grating-assisted autofocus device and autofocusing method for an imaging devicePERLITZ SASCHA·Filed 2012·Granted Mar 29, 2016·3 cites·31 claims
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