Assignee
PHASE SHIFT TECHNOLOGY INC
US·5 granted patents·161 citations·filing 1992–2003
Technology mixG01B5
Top patents by PatentIndex Score
5 records- 0194US6847458B2Method and apparatus for measuring the shape and thickness variation of polished opaque platesPHASE SHIFT TECHNOLOGY INC·Filed 2003·Granted Jan 25, 2005·81 cites·10 claims
- 0282US5471307ASheet flatness measurement system and methodPHASE SHIFT TECHNOLOGY INC·Filed 1992·Granted Nov 28, 1995·50 cites·19 claims
- 0357US6856405B2Non linear phase shift calibration for interferometric measurement of multiple surfacesPHASE SHIFT TECHNOLOGY INC·Filed 2003·Granted Feb 15, 2005·8 cites·7 claims
- 0454US5737081AExtended-source low coherence interferometer for flatness testingPHASE SHIFT TECHNOLOGY INC·Filed 1996·Granted Apr 7, 1998·18 cites·16 claims
- 0548US6885461B2Weighted least-square interferometric measurement of multiple surfacesPHASE SHIFT TECHNOLOGY INC·Filed 2002·Granted Apr 26, 2005·4 cites·26 claims
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