Assignee
PHILIPS DANNY MARIA HUBERTUS
NL·2 granted patents·2 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0162US8638417B2Fluid handling structure, lithographic apparatus and a device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2011·Granted Jan 28, 2014·1 cites·25 claims
- 0261US8405815B2Fluid handling structure, lithographic apparatus and device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2010·Granted Mar 26, 2013·1 cites·20 claims
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