Assignee
PIOTECH INC
CN·14 granted patents·10 pending applications·2 citations·filing 2019–2024
Top patents by PatentIndex Score
24 records- 0189US11767592B2Gas-dispersing apparatus for multiple chemical resourcesPIOTECH INC·Filed 2020·Granted Sep 26, 2023·2 cites·5 claims
- 0275US2024312828A1Apparatus and method for processing waferPIOTECH INC·Filed 2024·Application pending·0 cites
- 0366US2024200187A1Method for forming high-quality film by cvd processPIOTECH INC·Filed 2023·Application pending·0 cites
- 0465US12020975B2Apparatus and method for processing waferPIOTECH INC·Filed 2021·Granted Jun 25, 2024·0 cites·7 claims
- 0555US2022205087A1In-cavity cleaning methodPIOTECH INC·Filed 2021·Application pending·0 cites
- 0654US12043897B2Coating device and carrier seat thereofPIOTECH INC·Filed 2021·Granted Jul 23, 2024·0 cites·9 claims
- 0753US11437253B2Wafer pedestal with contact arrayPIOTECH INC·Filed 2020·Granted Sep 6, 2022·0 cites·10 claims
- 0852US12327748B2Semiconductor processing apparatus and methodPIOTECH INC·Filed 2021·Granted Jun 10, 2025·0 cites·4 claims
- 0952US11731145B2Multiple section showerhead assemblyPIOTECH INC·Filed 2020·Granted Aug 22, 2023·0 cites·11 claims
- 1051US11562891B2Method of temperature measurement used in radio-frequency processing apparatus for semiconductorPIOTECH INC·Filed 2019·Granted Jan 24, 2023·0 cites·2 claims
- 1150US11088012B2Wafer susceptor apparatus with thermal insulation and method for manufacturing the samePIOTECH INC·Filed 2019·Granted Aug 10, 2021·0 cites·7 claims
- 1250US2022208584A1Wafer transfer method and mechanical armPIOTECH INC·Filed 2021·Application pending·0 cites
- 1349US12351916B2Gas showerhead with controllable airflow distributionPIOTECH INC·Filed 2021·Granted Jul 8, 2025·0 cites·20 claims
- 1448US2021358782A1Substrate transfer module and semiconductor processing systemPIOTECH INC·Filed 2021·Application pending·0 cites
- 1548US2021398779A1Apparatus, system, and method for impedance adjustment of processing stationPIOTECH INC·Filed 2021·Application pending·0 cites
- 1647US11488802B2Semiconductor device for condition-controlled radio frequency systemPIOTECH INC·Filed 2021·Granted Nov 1, 2022·0 cites·9 claims
- 1747US2021305019A1Double-sided deposition apparatus and methodPIOTECH INC·Filed 2021·Application pending·0 cites
- 1846US12094755B2Protection mechanism and method for protecting wafer and pinPIOTECH INC·Filed 2021·Granted Sep 17, 2024·0 cites·16 claims
- 1945US12146220B2Apparatus and method for manufacturing semiconductor filmPIOTECH INC·Filed 2021·Granted Nov 19, 2024·0 cites·18 claims
- 2044US2022208577A1Manipulator finger, manipulator, and method of operating the samePIOTECH INC·Filed 2021·Application pending·0 cites
- 2143US2022208528A1Device for adjusting plasma edge in processing chamber and control method thereofPIOTECH INC·Filed 2021·Application pending·0 cites
- 2242US11990363B2Wafer support pin lifting devicePIOTECH INC·Filed 2021·Granted May 21, 2024·0 cites·14 claims
- 2342US2022351942A1Semiconductor processing apparatus and methodPIOTECH INC·Filed 2020·Application pending·0 cites
- 2432US12131938B2Automatic wafer carrying system and method for transferring wafer using the systemPIOTECH INC·Filed 2021·Granted Oct 29, 2024·0 cites·18 claims
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