Assignee
PIVOTAL SYSTEMS CORP
US·13 granted patents·2 pending applications·178 citations·filing 2006–2024
Top patents by PatentIndex Score
15 records- 0196US7823436B2Method and apparatus for in situ testing of gas flow controllersPIVOTAL SYSTEMS CORP·Filed 2009·Granted Nov 2, 2010·37 cites·4 claims
- 0292US7757541B1Techniques for calibration of gas flowsPIVOTAL SYSTEMS CORP·Filed 2007·Granted Jul 20, 2010·23 cites·30 claims
- 0390US7590498B1System and method for vacuum chamber leak detectionPIVOTAL SYSTEMS CORP·Filed 2007·Granted Sep 15, 2009·33 cites·31 claims
- 0488US7937232B1Data timestamp managementPIVOTAL SYSTEMS CORP·Filed 2007·Granted May 3, 2011·32 cites·13 claims
- 0587US9983595B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2016·Granted May 29, 2018·5 cites·20 claims
- 0685US9904297B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2014·Granted Feb 27, 2018·6 cites·12 claims
- 0783US9523435B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2014·Granted Dec 20, 2016·5 cites·16 claims
- 0882US10401202B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2016·Granted Sep 3, 2019·8 cites·9 claims
- 0982US7695984B1Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processesPIVOTAL SYSTEMS CORP·Filed 2006·Granted Apr 13, 2010·8 cites·22 claims
- 1081US7940395B2Method and apparatus for identifying the chemical composition of a gasPIVOTAL SYSTEMS CORP·Filed 2008·Granted May 10, 2011·6 cites·38 claims
- 1177US7871830B2End point detection method for plasma etching of semiconductor wafers with low exposed areaPIVOTAL SYSTEMS CORP·Filed 2006·Granted Jan 18, 2011·9 cites·10 claims
- 1273US7873052B2System and method for controlling process end-point utilizing legacy end-point systemPIVOTAL SYSTEMS CORP·Filed 2007·Granted Jan 18, 2011·5 cites·19 claims
- 1371US11079035B2Preloaded piezo actuator and gas valve employing the actuatorPIVOTAL SYSTEMS CORP·Filed 2019·Granted Aug 3, 2021·1 cites·21 claims
- 1452US2024385632A1Method and apparatus for controlled splitting of fluid flowsPIVOTAL SYSTEMS CORP·Filed 2024·Application pending·0 cites
- 1548US2011108126A1Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →