Assignee
PLANAR SOLUTIONS LLC
US·2 granted patents·4 pending applications·36 citations·filing 2002–2008
Top patents by PatentIndex Score
6 records- 0178US6749488B2Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafersPLANAR SOLUTIONS LLC·Filed 2002·Granted Jun 15, 2004·24 cites·2 claims
- 0267US6776696B2Continuous chemical mechanical polishing process for polishing multiple conductive and non-conductive layers on semiconductor wafersPLANAR SOLUTIONS LLC·Filed 2002·Granted Aug 17, 2004·12 cites·72 claims
- 0349US2007254964A1Ultrapure colloidal silica for use in chemical mechanical polishing applicationsPLANAR SOLUTIONS LLC·Filed 2007·Application pending·0 cites
- 0445US2006283095A1Fumed silica to colloidal silica conversion processPLANAR SOLUTIONS LLC·Filed 2005·Application pending·0 cites
- 0545US2009053896A1Copper polishing slurryPLANAR SOLUTIONS LLC·Filed 2008·Application pending·0 cites
- 0635US2006124593A1Colloidal silica based chemical mechanical polishing slurryPLANAR SOLUTIONS LLC·Filed 2005·Application pending·0 cites
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