Assignee
PLASMA CONTROL SYSTEMS LLC
US·3 granted patents·121 citations·filing 2002–2004
Top patents by PatentIndex Score
3 records- 0186US7100532B2Plasma production device and method and RF driver circuit with adjustable duty cyclePLASMA CONTROL SYSTEMS LLC·Filed 2004·Granted Sep 5, 2006·41 cites·33 claims
- 0283US7132996B2Plasma production device and method and RF driver circuitPLASMA CONTROL SYSTEMS LLC·Filed 2002·Granted Nov 7, 2006·24 cites·41 claims
- 0383US7084832B2Plasma production device and method and RF driver circuit with adjustable duty cyclePLASMA CONTROL SYSTEMS LLC·Filed 2003·Granted Aug 1, 2006·56 cites·17 claims
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