Assignee
PLASMA & MATERIALS TECH
US·5 granted patents·1,201 citations·filing 1989–1992
Top patents by PatentIndex Score
5 records- 0197US4990229AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1989·Granted Feb 5, 1991·363 cites·18 claims
- 0296US5429070AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1992·Granted Jul 4, 1995·277 cites·13 claims
- 0396US5091049AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1990·Granted Feb 25, 1992·150 cites·16 claims
- 0494US5122251AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1991·Granted Jun 16, 1992·281 cites·34 claims
- 0593US5421891AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1992·Granted Jun 6, 1995·130 cites·17 claims
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