Assignee
PLASMION
FR·2 granted patents·14 citations·filing 1994–1995
Top patents by PatentIndex Score
2 records- 0147US5637150ADevice and method for forming a plasma by application of microwavesPLASMION·Filed 1994·Granted Jun 10, 1997·11 cites·9 claims
- 0224US5754008ADevice for creating a beam of adjustable-energy ions particularly for sequential vacuum treatment of surfaces with large dimensionsPLASMION·Filed 1995·Granted May 19, 1998·3 cites·8 claims
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