Assignee
PLATZGUMMER ELMAR
AT·8 granted patents·309 citations·filing 2006–2010
Top patents by PatentIndex Score
8 records- 0199US8115183B2Method for maskless particle-beam exposurePLATZGUMMER ELMAR·Filed 2010·Granted Feb 14, 2012·73 cites·7 claims
- 0298US8546767B2Pattern definition device with multiple multibeam arrayPLATZGUMMER ELMAR·Filed 2010·Granted Oct 1, 2013·58 cites·13 claims
- 0397US8198601B2Method for producing a multi-beam deflector array device having electrodesPLATZGUMMER ELMAR·Filed 2010·Granted Jun 12, 2012·54 cites·20 claims
- 0497US8183543B2Multi-beam sourcePLATZGUMMER ELMAR·Filed 2008·Granted May 22, 2012·40 cites·45 claims
- 0595US8563942B2Multi-beam deflector array means with bonded electrodesPLATZGUMMER ELMAR·Filed 2010·Granted Oct 22, 2013·26 cites·16 claims
- 0694US8258488B2Compensation of dose inhomogeneity and image distortionPLATZGUMMER ELMAR·Filed 2009·Granted Sep 4, 2012·28 cites·14 claims
- 0793US8304749B2Charged-particle exposure apparatus with electrostatic zone platePLATZGUMMER ELMAR·Filed 2006·Granted Nov 6, 2012·25 cites·20 claims
- 0881US8278635B2Global point spreading function in multi-beam patterningPLATZGUMMER ELMAR·Filed 2010·Granted Oct 2, 2012·5 cites·10 claims
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