Assignee
PLUMHOFF JASON
US·3 granted patents·2 citations·filing 2006–2007
Top patents by PatentIndex Score
3 records- 0166US7867403B2Temperature control method for photolithographic substratePLUMHOFF JASON·Filed 2007·Granted Jan 11, 2011·2 cites·20 claims
- 0244US8187483B2Method to minimize CD etch biasPLUMHOFF JASON·Filed 2007·Granted May 29, 2012·0 cites·16 claims
- 0339US7749400B2Method for etching photolithographic substratesPLUMHOFF JASON·Filed 2006·Granted Jul 6, 2010·0 cites·17 claims
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