Assignee

POMAREDE CHRISTOPHE

DE·1 granted patent·9 citations·filing 2012–2012

Technology mixC23C1 F17C1 H01J1 H01L1 H10B1 H10D1

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0185US9238865B2Multiple vapor sources for vapor depositionPOMAREDE CHRISTOPHE·Filed 2012·Granted Jan 19, 2016·9 cites·9 claims

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