Assignee
POOCK ANDRE
DE·1 granted patent·1 pending application·1 citations·filing 2009–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0146US8660681B2Method and system for excursion monitoring in optical lithography processes in micro device fabricationPOOCK ANDRE·Filed 2011·Granted Feb 25, 2014·1 cites·17 claims
- 0235US2010112468A1Self-correcting substrate support system for focus control in exposure systemsPOOCK ANDRE·Filed 2009·Application pending·0 cites
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