Assignee

POOLE JAN B LE

NL·1 granted patent·36 citations·filing 1983–1983

Technology mixB82Y1 H01J1

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0185US4524278ACharged particle beam exposure device incorporating beam splittingPOOLE JAN B LE·Filed 1983·Granted Jun 18, 1985·36 cites·28 claims

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