Assignee
POON ALEX KA TIM
US·9 granted patents·137 citations·filing 2008–2012
Top patents by PatentIndex Score
9 records- 0197US8934080B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2012·Granted Jan 13, 2015·33 cites·21 claims
- 0296US8289497B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2009·Granted Oct 16, 2012·35 cites·36 claims
- 0395US8610873B2Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substratePOON ALEX KA TIM·Filed 2009·Granted Dec 17, 2013·26 cites·34 claims
- 0493US8068209B2Nozzle to help reduce the escape of immersion liquid from an immersion lithography toolPOON ALEX KA TIM·Filed 2008·Granted Nov 29, 2011·34 cites·8 claims
- 0585US8520187B2Apparatus and method for providing fluid for immersion lithographyPOON ALEX KA TIM·Filed 2009·Granted Aug 27, 2013·4 cites·18 claims
- 0672US8634055B2Apparatus and method to control vacuum at porous material using multiple porous materialsPOON ALEX KA TIM·Filed 2010·Granted Jan 21, 2014·2 cites·47 claims
- 0772US8477284B2Apparatus and method to control vacuum at porous material using multiple porous materialsPOON ALEX KA TIM·Filed 2009·Granted Jul 2, 2013·3 cites·42 claims
- 0853US9285683B2Apparatus and method for providing fluid for immersion lithographyPOON ALEX KA TIM·Filed 2011·Granted Mar 15, 2016·0 cites·16 claims
- 0953US8780323B2Apparatus and method for recovering liquid droplets in immersion lithographyPOON ALEX KA TIM·Filed 2011·Granted Jul 15, 2014·0 cites·23 claims
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