Assignee
PRODUCTION ET DE RECH S APPLIQ
FR·5 granted patents·54 citations·filing 2001–2006
Top patents by PatentIndex Score
5 records- 0178US6819423B2High spatial resolution infrared ellipsometerPRODUCTION ET DE RECH S APPLIQ·Filed 2001·Granted Nov 16, 2004·35 cites·20 claims
- 0274US7763394B2Protected pattern mask for reflection lithography in the extreme UV or soft X-ray rangePRODUCTION ET DE RECH S APPLIQ·Filed 2005·Granted Jul 27, 2010·4 cites·17 claims
- 0366US6687002B2Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the likePRODUCTION ET DE RECH S APPLIQ·Filed 2001·Granted Feb 3, 2004·13 cites·18 claims
- 0441US7714992B2Equipment and method for monitoring an immersion lithography devicePRODUCTION ET DE RECH S APPLIQ·Filed 2006·Granted May 11, 2010·0 cites·19 claims
- 0541US7230701B2Compact spectroscopic ellipsometerPRODUCTION ET DE RECH S APPLIQ·Filed 2001·Granted Jun 12, 2007·2 cites·28 claims
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