Assignee
QUANTISCRIPT INC
CA·3 granted patents·64 citations·filing 1998–2002
Top patents by PatentIndex Score
3 records- 0180US6261938B1Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithographyQUANTISCRIPT INC·Filed 1998·Granted Jul 17, 2001·52 cites·38 claims
- 0258US6897140B2Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithographyQUANTISCRIPT INC·Filed 2001·Granted May 24, 2005·8 cites·22 claims
- 0347US6855646B2Plasma polymerized electron beam resistQUANTISCRIPT INC·Filed 2002·Granted Feb 15, 2005·4 cites·29 claims
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