Assignee

QUARK SYSTEMS CO LTD

US·1 granted patent·54 citations·filing 1998–1998

Technology mixB01J1 C02F1 H01J1

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0179US6194821B1Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatusQUARK SYSTEMS CO LTD·Filed 1998·Granted Feb 27, 2001·54 cites·9 claims

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