Assignee

QUINTEL CORP

1 granted patent·13 citations·filing 1979–1979

Technology mixG03B1 G03F1 Y10T1

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0149US4278348ALocking mechanism for use in a chuck for an optical alignment and exposure apparatusQUINTEL CORP·Filed 1979·Granted Jul 14, 1981·13 cites·19 claims

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