Assignee
RAJAGOPALAN NAGARAJAN
US·4 granted patents·2 pending applications·516 citations·filing 2004–2010
Top patents by PatentIndex Score
6 records- 0196US8076250B1PECVD oxide-nitride and oxide-silicon stacks for 3D memory applicationRAJAGOPALAN NAGARAJAN·Filed 2010·Granted Dec 13, 2011·488 cites·20 claims
- 0287US8283237B2Fabrication of through-silicon vias on silicon wafersRAJAGOPALAN NAGARAJAN·Filed 2010·Granted Oct 9, 2012·11 cites·34 claims
- 0385US8563095B2Silicon nitride passivation layer for covering high aspect ratio featuresRAJAGOPALAN NAGARAJAN·Filed 2010·Granted Oct 22, 2013·11 cites·35 claims
- 0480US8329575B2Fabrication of through-silicon vias on silicon wafersRAJAGOPALAN NAGARAJAN·Filed 2010·Granted Dec 11, 2012·6 cites·24 claims
- 0542US2005233555A1Adhesion improvement for low k dielectrics to conductive materialsRAJAGOPALAN NAGARAJAN·Filed 2004·Application pending·0 cites
- 0639US2006093756A1High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD filmsRAJAGOPALAN NAGARAJAN·Filed 2004·Application pending·0 cites
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