Assignee
RAKHOVSKY VADIM
US·6 granted patents·1 pending application·18 citations·filing 2013–2019
Top patents by PatentIndex Score
7 records- 0186US9310768B2Method for synthesis and formation of a digital hologram for use in microlithographyRAKHOVSKY VADIM·Filed 2013·Granted Apr 12, 2016·10 cites·19 claims
- 0278US9952516B1System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surfaceRAKHOVSKY VADIM·Filed 2017·Granted Apr 24, 2018·4 cites·10 claims
- 0375US9323219B2Method of microlithography with the use of divergent/convergent beams for holographic restoration of an imageRAKHOVSKY VADIM·Filed 2014·Granted Apr 26, 2016·3 cites·19 claims
- 0466US10162307B2System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beamRAKHOVSKY VADIM·Filed 2017·Granted Dec 25, 2018·1 cites·16 claims
- 0552US10768531B1System and method of maskless lithography with the use of a curvilinear hologramRAKHOVSKY VADIM·Filed 2019·Granted Sep 8, 2020·0 cites·9 claims
- 0647US2015378306A1Method for illumination of a hologram in holographic lithography and a multi-component illuminator for carrying out the methodRAKHOVSKY VADIM·Filed 2014·Application pending·0 cites
- 0744US9557711B2Method of static scaling of image in holographic lithographyRAKHOVSKY VADIM·Filed 2014·Granted Jan 31, 2017·0 cites·12 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →