Assignee
RAMACHANDRAN BALASUBRAMANIAN
US·4 granted patents·20 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0191US9347132B2Optical endpoint detection systemRAMACHANDRAN BALASUBRAMANIAN·Filed 2012·Granted May 24, 2016·10 cites·20 claims
- 0281US8513626B2Method and apparatus for reducing patterning effects on a substrate during radiation-based heatingRAMACHANDRAN BALASUBRAMANIAN·Filed 2007·Granted Aug 20, 2013·7 cites·15 claims
- 0370US9127360B2Epitaxial chamber with cross flowRAMACHANDRAN BALASUBRAMANIAN·Filed 2010·Granted Sep 8, 2015·3 cites·18 claims
- 0442US8217574B2Lamp with internal fuse systemRAMACHANDRAN BALASUBRAMANIAN·Filed 2010·Granted Jul 10, 2012·0 cites·18 claims
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