Assignee
RAMASWAMY KARTIK
US·3 granted patents·3 pending applications·20 citations·filing 2005–2012
Top patents by PatentIndex Score
6 records- 0190US8920597B2Symmetric VHF source for a plasma reactorRAMASWAMY KARTIK·Filed 2011·Granted Dec 30, 2014·9 cites·8 claims
- 0273US8578879B2Apparatus for VHF impedance match tuningRAMASWAMY KARTIK·Filed 2009·Granted Nov 12, 2013·7 cites·26 claims
- 0364US8148977B2Apparatus for characterizing a magnetic field in a magnetically enhanced substrate processing systemRAMASWAMY KARTIK·Filed 2009·Granted Apr 3, 2012·4 cites·13 claims
- 0446US2011256691A1Removal of surface dopants from a substrateRAMASWAMY KARTIK·Filed 2011·Application pending·0 cites
- 0542US2013098873A1Overhead electron beam source for plasma ion generation in a workpiece processing regionRAMASWAMY KARTIK·Filed 2012·Application pending·0 cites
- 0640US2006260545A1Low temperature absorption layer deposition and high speed optical annealing systemRAMASWAMY KARTIK·Filed 2005·Application pending·0 cites
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