Assignee

RAMIREZ JORGE

US·1 granted patent·4 citations·filing 2008–2008

Technology mixH01L1 H10F1 H10P1 Y02E1

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0161US8894803B2Apparatus and method for etching the surface of a semiconductor substrateRAMIREZ JORGE·Filed 2008·Granted Nov 25, 2014·4 cites·12 claims

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