Assignee

RECIF INC

FR·1 granted patent·26 citations·filing 2002–2002

Technology mixB08B1 H10P1 Y10S1

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0177US6880560B2Substrate processing apparatus for processing substrates using dense phase gas and sonic wavesRECIF INC·Filed 2002·Granted Apr 19, 2005·26 cites·15 claims

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