Assignee
RENWICK STEPHEN P
US·2 granted patents·6 citations·filing 2008–2009
Top patents by PatentIndex Score
2 records- 0178US8438507B2Systems and methods for adjusting a lithographic scannerRENWICK STEPHEN P·Filed 2009·Granted May 7, 2013·6 cites·32 claims
- 0251US8300214B2System and method for an adjusting optical proximity effect for an exposure apparatusRENWICK STEPHEN P·Filed 2008·Granted Oct 30, 2012·0 cites·20 claims
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