Assignee
RITCHIE ALAN
US·6 granted patents·40 citations·filing 2011–2012
Top patents by PatentIndex Score
6 records- 0196US9580796B2Deposition apparatus and methods to reduce deposition asymmetryRITCHIE ALAN·Filed 2011·Granted Feb 28, 2017·31 cites·7 claims
- 0275US9340866B2Substrate support with radio frequency (RF) return pathRITCHIE ALAN·Filed 2012·Granted May 17, 2016·3 cites·20 claims
- 0375US8795487B2Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF powerRITCHIE ALAN·Filed 2011·Granted Aug 5, 2014·3 cites·19 claims
- 0468US8846451B2Methods for depositing metal in high aspect ratio featuresRITCHIE ALAN·Filed 2011·Granted Sep 30, 2014·2 cites·20 claims
- 0564US8702918B2Apparatus for enabling concentricity of plasma dark spaceRITCHIE ALAN·Filed 2011·Granted Apr 22, 2014·1 cites·20 claims
- 0645US9695502B2Process kit with plasma-limiting gapRITCHIE ALAN·Filed 2012·Granted Jul 4, 2017·0 cites·14 claims
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