Assignee
ROBOPTEK INC
US·3 granted patents·209 citations·filing 1986–1987
Top patents by PatentIndex Score
3 records- 0181US4880348AWafer centration deviceROBOPTEK INC·Filed 1987·Granted Nov 14, 1989·70 cites·6 claims
- 0280US4746256AApparatus for handling sensitive material such as semiconductor wafersROBOPTEK INC·Filed 1986·Granted May 24, 1988·82 cites·15 claims
- 0377US4895486AWafer monitoring deviceROBOPTEK INC·Filed 1987·Granted Jan 23, 1990·57 cites·9 claims
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