Assignee
RODEL INC
US·122 granted patents·8,356 citations·filing 1976–2003
Top patents by PatentIndex Score
122 records- 0199US5605760APolishing padsRODEL INC·Filed 1995·Granted Feb 25, 1997·424 cites·8 claims
- 0298US5578362APolymeric polishing pad containing hollow polymeric microelementsRODEL INC·Filed 1994·Granted Nov 26, 1996·433 cites·21 claims
- 0398US4959113AMethod and composition for polishing metal surfacesRODEL INC·Filed 1989·Granted Sep 25, 1990·201 cites·20 claims
- 0498US4927432APad material for grinding, lapping and polishingRODEL INC·Filed 1986·Granted May 22, 1990·231 cites·19 claims
- 0598US4728552ASubstrate containing fibers of predetermined orientation and process of making the sameRODEL INC·Filed 1984·Granted Mar 1, 1988·156 cites·25 claims
- 0697US6749485B1Hydrolytically stable grooved polishing pads for chemical mechanical planarizationRODEL INC·Filed 2000·Granted Jun 15, 2004·98 cites·31 claims
- 0797US6736709B1Grooved polishing pads for chemical mechanical planarizationRODEL INC·Filed 2000·Granted May 18, 2004·96 cites·28 claims
- 0897US6582283B2Polishing pads for chemical mechanical planarizationRODEL INC·Filed 2002·Granted Jun 24, 2003·71 cites·10 claims
- 0997US6454634B1Polishing pads for chemical mechanical planarizationRODEL INC·Filed 2000·Granted Sep 24, 2002·123 cites·48 claims
- 1097US6022268APolishing pads and methods relating theretoRODEL INC·Filed 1998·Granted Feb 8, 2000·157 cites·21 claims
- 1197US5900164AMethod for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelementsRODEL INC·Filed 1997·Granted May 4, 1999·141 cites·17 claims
- 1297US5489233APolishing pads and methods for their useRODEL INC·Filed 1994·Granted Feb 6, 1996·479 cites·28 claims
- 1397US5389352AOxide particles and method for producing themRODEL INC·Filed 1993·Granted Feb 14, 1995·117 cites·8 claims
- 1496US6641471B1Polishing pad having an advantageous micro-texture and methods relating theretoRODEL INC·Filed 2000·Granted Nov 4, 2003·184 cites·47 claims
- 1596US6171181B1Molded polishing pad having integral windowRODEL INC·Filed 1999·Granted Jan 9, 2001·165 cites·15 claims
- 1696US5693239APolishing slurries comprising two abrasive components and methods for their useRODEL INC·Filed 1995·Granted Dec 2, 1997·133 cites·20 claims
- 1796US5264010ACompositions and methods for polishing and planarizing surfacesRODEL INC·Filed 1992·Granted Nov 23, 1993·172 cites·24 claims
- 1895US6387312B1Molding a polishing pad having integral windowRODEL INC·Filed 2000·Granted May 14, 2002·56 cites·5 claims
- 1995US6358130B1Polishing padRODEL INC·Filed 2000·Granted Mar 19, 2002·125 cites·10 claims
- 2095US6293852B1Polishing pads and methods relating theretoRODEL INC·Filed 2000·Granted Sep 25, 2001·46 cites·28 claims
- 2195US5391258ACompositions and methods for polishingRODEL INC·Filed 1993·Granted Feb 21, 1995·256 cites·16 claims
- 2294US6488570B1Method relating to a polishing system having a multi-phase polishing layerRODEL INC·Filed 2000·Granted Dec 3, 2002·68 cites·8 claims
- 2394US6231434B1Polishing pads and methods relating theretoRODEL INC·Filed 2000·Granted May 15, 2001·44 cites·2 claims
- 2494US6218305B1Composition and method for polishing a composite of silica and silicon nitrideRODEL INC·Filed 2000·Granted Apr 17, 2001·72 cites·8 claims
- 2594US6017265AMethods for using polishing padsRODEL INC·Filed 1997·Granted Jan 25, 2000·186 cites·8 claims
- 2694US5257478AApparatus for interlayer planarization of semiconductor materialRODEL INC·Filed 1992·Granted Nov 2, 1993·311 cites·9 claims
- 2793US6210254B1Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s)RODEL INC·Filed 2000·Granted Apr 3, 2001·45 cites·1 claims
- 2892US6679928B2Polishing composition having a surfactantRODEL INC·Filed 2002·Granted Jan 20, 2004·64 cites·16 claims
- 2992US6648733B2Polishing pads and methods relating theretoRODEL INC·Filed 2001·Granted Nov 18, 2003·45 cites·24 claims
- 3092US6632259B2Chemical mechanical polishing compositions and methods relating theretoRODEL INC·Filed 2001·Granted Oct 14, 2003·43 cites·17 claims
- 3192US6500053B2Polishing pads and methods relating theretoRODEL INC·Filed 2002·Granted Dec 31, 2002·42 cites·17 claims
- 3292US6069080AFixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the likeRODEL INC·Filed 1998·Granted May 30, 2000·126 cites·37 claims
- 3392US5738800AComposition and method for polishing a composite of silica and silicon nitrideRODEL INC·Filed 1997·Granted Apr 14, 1998·117 cites·8 claims
- 3492US5476606ACompositions and methods for polishingRODEL INC·Filed 1994·Granted Dec 19, 1995·144 cites·6 claims
- 3591US6682402B1Polishing pads and methods relating theretoRODEL INC·Filed 2000·Granted Jan 27, 2004·47 cites·6 claims
- 3691US6517417B2Polishing pad with a transparent portionRODEL INC·Filed 2001·Granted Feb 11, 2003·38 cites·34 claims
- 3791US6022264APolishing pad and methods relating theretoRODEL INC·Filed 1998·Granted Feb 8, 2000·99 cites·18 claims
- 3890US6428586B1Method of manufacturing a polymer or polymer/composite polishing padRODEL INC·Filed 2000·Granted Aug 6, 2002·57 cites·22 claims
- 3990US6354915B1Polishing pads and methods relating theretoRODEL INC·Filed 2000·Granted Mar 12, 2002·54 cites·21 claims
- 4090US6337281B1Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the likeRODEL INC·Filed 2000·Granted Jan 8, 2002·44 cites·31 claims
- 4190US6328634B1Method of polishingRODEL INC·Filed 2000·Granted Dec 11, 2001·70 cites·12 claims
- 4290US6095902APolyether-polyester polyurethane polishing pads and related methodsRODEL INC·Filed 1998·Granted Aug 1, 2000·86 cites·6 claims
- 4390US6036579APolymeric polishing pad having photolithographically induced surface patterns(s) and methods relating theretoRODEL INC·Filed 1998·Granted Mar 14, 2000·82 cites·15 claims
- 4490US5769689ACompositions and methods for polishing silica, silicates, and silicon nitrideRODEL INC·Filed 1996·Granted Jun 23, 1998·97 cites·18 claims
- 4590US4841680AInverted cell pad material for grinding, lapping, shaping and polishingRODEL INC·Filed 1988·Granted Jun 27, 1989·147 cites·8 claims
- 4689US6419556B1Method of polishing using a polishing padRODEL INC·Filed 2000·Granted Jul 16, 2002·33 cites·7 claims
- 4789US6099394APolishing system having a multi-phase polishing substrate and methods relating theretoRODEL INC·Filed 1998·Granted Aug 8, 2000·82 cites·13 claims
- 4889US5487697APolishing apparatus and method using a rotary work holder travelling down a rail for polishing a workpiece with linear padsRODEL INC·Filed 1993·Granted Jan 30, 1996·64 cites·20 claims
- 4988US6607424B1Compositions for insulator and metal CMP and methods relating theretoRODEL INC·Filed 2000·Granted Aug 19, 2003·47 cites·16 claims
- 5087US6561891B2Eliminating air pockets under a polished padRODEL INC·Filed 2001·Granted May 13, 2003·38 cites·9 claims
Showing the top 50 of 122 patent records by PatentIndex Score.
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