Assignee

ROMANOVSKY ANATOLY

US·2 granted patents·37 citations·filing 2011–2012

Technology mixG01N2 H10P2 G01J1 G02B1

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2 records

0194US9279774B2Wafer inspectionROMANOVSKY ANATOLY·Filed 2012·Granted Mar 8, 2016·29 cites·19 claims
0284US8432944B2Extending the lifetime of a deep UV laser in a wafer inspection toolROMANOVSKY ANATOLY·Filed 2011·Granted Apr 30, 2013·8 cites·8 claims

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