Assignee
ROTH & RAU AG
DE·1 granted patent·4 pending applications·0 citations·filing 2007–2016
Top patents by PatentIndex Score
5 records- 0141US2016181070A1Device for ion implantationROTH & RAU AG·Filed 2016·Application pending·0 cites
- 0240US9556517B2Gas separationROTH & RAU AG·Filed 2013·Granted Jan 31, 2017·0 cites·18 claims
- 0337US2011124144A1Substrate processing system and substrate processing methodROTH & RAU AG·Filed 2009·Application pending·0 cites
- 0435US2009242131A1Ecr plasma sourceROTH & RAU AG·Filed 2007·Application pending·0 cites
- 0534US2015152555A1Process moduleROTH & RAU AG·Filed 2013·Application pending·0 cites
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