Assignee
RUDHARD JOACHIM
DE·2 granted patents·4 pending applications·9 citations·filing 2004–2009
Top patents by PatentIndex Score
6 records- 0178US8470630B2Method for capping a MEMS wafer and MEMS waferRUDHARD JOACHIM·Filed 2009·Granted Jun 25, 2013·9 cites·18 claims
- 0253US2011083606A1Exhaust gas treatment device for a cvd device, cvd device, and exhaust gas treatment methodRUDHARD JOACHIM·Filed 2009·Application pending·0 cites
- 0344US2010086463A1Method for structuring silicon carbide with the aid of fluorine-containing compoundsRUDHARD JOACHIM·Filed 2009·Application pending·0 cites
- 0439US8791620B2Micromechanical actuator having multiple jointsRUDHARD JOACHIM·Filed 2007·Granted Jul 29, 2014·0 cites·4 claims
- 0537US2010006427A1Reactor for carrying out an etching method for a stack of masked wafers and an etching methodRUDHARD JOACHIM·Filed 2006·Application pending·0 cites
- 0629US2007087464A1Method for producing etched holes and/or etched trenches as well as a diaphragm sensor unitRUDHARD JOACHIM·Filed 2004·Application pending·0 cites
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