Assignee
S E S COMPANY LTD
JP·8 granted patents·74 citations·filing 2001–2003
Top patents by PatentIndex Score
8 records- 0173US6824621B2Single wafer type substrate cleaning method and apparatusS E S COMPANY LTD·Filed 2001·Granted Nov 30, 2004·22 cites·4 claims
- 0272US6637445B2Substrate processing unitS E S COMPANY LTD·Filed 2001·Granted Oct 28, 2003·22 cites·9 claims
- 0368US6807974B2Single wafer type substrate cleaning method and apparatusS E S COMPANY LTD·Filed 2002·Granted Oct 26, 2004·11 cites·9 claims
- 0463US7029538B2Single wafer type substrate cleaning method and apparatusS E S COMPANY LTD·Filed 2001·Granted Apr 18, 2006·8 cites·3 claims
- 0554US6752877B2Single wafer type cleaning method and apparatusS E S COMPANY LTD·Filed 2001·Granted Jun 22, 2004·4 cites·3 claims
- 0650US6915809B2Single wafer type substrate cleaning method and apparatusS E S COMPANY LTD·Filed 2003·Granted Jul 12, 2005·5 cites·9 claims
- 0748US6792959B2Single wafer type cleaning method and apparatusS E S COMPANY LTD·Filed 2003·Granted Sep 21, 2004·2 cites·7 claims
- 0827US6763839B2Substrate cleaning systemS E S COMPANY LTD·Filed 2001·Granted Jul 20, 2004·0 cites·5 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →