Assignee
SAIGUSA HIDEHITO
JP·2 granted patents·8 citations·filing 2006–2007
Top patents by PatentIndex Score
2 records- 0181US8117986B2Apparatus for an improved deposition shield in a plasma processing systemSAIGUSA HIDEHITO·Filed 2006·Granted Feb 21, 2012·6 cites·22 claims
- 0270US8118936B2Method and apparatus for an improved baffle plate in a plasma processing systemSAIGUSA HIDEHITO·Filed 2007·Granted Feb 21, 2012·2 cites·26 claims
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