Assignee
SAKAMOTO SHINJI
JP·2 granted patents·6 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0173US8280632B2Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatusSAKAMOTO SHINJI·Filed 2009·Granted Oct 2, 2012·4 cites·9 claims
- 0261US8339594B2Method for measuring semiconductor wafer profile and device for measuring the same used thereforSAKAMOTO SHINJI·Filed 2010·Granted Dec 25, 2012·2 cites·8 claims
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