Assignee
SAMSUNG AUSTIN SEMICONDUCTOR
US·14 granted patents·2 pending applications·217 citations·filing 1999–2013
Top patents by PatentIndex Score
16 records- 0187US6224472B1Retaining ring for chemical mechanical polishingSAMSUNG AUSTIN SEMICONDUCTOR·Filed 1999·Granted May 1, 2001·142 cites·22 claims
- 0274US7486391B2System and method for haze control in semiconductor processesSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2006·Granted Feb 3, 2009·9 cites·19 claims
- 0368US6884145B2High selectivity slurry delivery systemSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2002·Granted Apr 26, 2005·14 cites·26 claims
- 0466US6689668B1Methods to improve density and uniformity of hemispherical grain silicon layersSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2000·Granted Feb 10, 2004·13 cites·40 claims
- 0564US6939132B2Semiconductor workpiece apparatusSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2002·Granted Sep 6, 2005·13 cites·13 claims
- 0661US7636611B2Fuzzy logic system for process control in chemical mechanical polishingSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2005·Granted Dec 22, 2009·5 cites·20 claims
- 0749US7404757B2Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing systemSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2004·Granted Jul 29, 2008·3 cites·10 claims
- 0846US6495477B2Method for forming a nitridized interface on a semiconductor substrateSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2001·Granted Dec 17, 2002·3 cites·12 claims
- 0945US6403455B1Methods of fabricating a memory deviceSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2000·Granted Jun 11, 2002·8 cites·20 claims
- 1045US6290741B1Auxiliary device for filter exchange in clean roomSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2000·Granted Sep 18, 2001·7 cites·43 claims
- 1141US7759600B2Rupture resistant plasma tubeSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2006·Granted Jul 20, 2010·0 cites·20 claims
- 1235US9385018B2Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufactureSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2013·Granted Jul 5, 2016·0 cites·20 claims
- 1332US2008289766A1Hot edge ring apparatus and method for increased etch rate uniformity and reduced polymer buildupSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2007·Application pending·0 cites
- 1432US2006108069A1Plasma reaction chamber and captive silicon electrode plate for processing semiconductor wafersSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2004·Application pending·0 cites
- 1530US8383323B2Selective imaging through dual photoresist layersSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2006·Granted Feb 26, 2013·0 cites·20 claims
- 1627US6597117B2Plasma coilSAMSUNG AUSTIN SEMICONDUCTOR·Filed 2001·Granted Jul 22, 2003·0 cites·38 claims
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