Assignee
SANCHEZ ERROL ANTONIO C
US·6 granted patents·1 pending application·638 citations·filing 2011–2013
Top patents by PatentIndex Score
7 records- 0198US8647439B2Method of epitaxial germanium tin alloy surface preparationSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Feb 11, 2014·392 cites·18 claims
- 0297US8309440B2Method and apparatus for cleaning a substrate surfaceSANCHEZ ERROL ANTONIO C·Filed 2011·Granted Nov 13, 2012·233 cites·20 claims
- 0389US9512520B2Semiconductor substrate processing systemSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Dec 6, 2016·9 cites·17 claims
- 0476US9082684B2Method of epitaxial doped germanium tin alloy formationSANCHEZ ERROL ANTONIO C·Filed 2013·Granted Jul 14, 2015·3 cites·18 claims
- 0564US8669590B2Methods and apparatus for forming silicon germanium-carbon semiconductor structuresSANCHEZ ERROL ANTONIO C·Filed 2011·Granted Mar 11, 2014·1 cites·19 claims
- 0650US9476144B2Method and apparatus for the selective deposition of epitaxial germanium stressor alloysSANCHEZ ERROL ANTONIO C·Filed 2011·Granted Oct 25, 2016·0 cites·19 claims
- 0748US2012270384A1Apparatus for deposition of materials on a substrateSANCHEZ ERROL ANTONIO C·Filed 2011·Application pending·0 cites
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