Assignee

SANDNER THILO

DE·1 granted patent·20 citations·filing 2012–2012

Technology mixG01J1 G02B1

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0187US8842356B2Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical deviceSANDNER THILO·Filed 2012·Granted Sep 23, 2014·20 cites·18 claims

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