Assignee
SANDSTROEM TORBJOERN
SE·11 granted patents·57 citations·filing 2006–2010
Top patents by PatentIndex Score
11 records- 0195US8160351B2Method and apparatus for mura detection and metrologySANDSTROEM TORBJOERN·Filed 2008·Granted Apr 17, 2012·31 cites·14 claims
- 0293US8537416B2Rotor optics imaging method and system with variable dose during sweepSANDSTROEM TORBJOERN·Filed 2010·Granted Sep 17, 2013·7 cites·20 claims
- 0388US8102410B2Writing apparatuses and methodsSANDSTROEM TORBJOERN·Filed 2006·Granted Jan 24, 2012·8 cites·20 claims
- 0484US8144307B2Image forming method and apparatusSANDSTROEM TORBJOERN·Filed 2008·Granted Mar 27, 2012·5 cites·12 claims
- 0570US8531755B2SLM device and method combining multiple mirrors for high-power deliverySANDSTROEM TORBJOERN·Filed 2010·Granted Sep 10, 2013·2 cites·28 claims
- 0665US8442302B2Method and device using rotating printing arm to project or view image across a workpieceSANDSTROEM TORBJOERN·Filed 2009·Granted May 14, 2013·3 cites·33 claims
- 0764US8067134B2Method of iterative compensation for non-linear effects in three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 29, 2011·1 cites·23 claims
- 0856US8472089B2Rotor imaging system and method with variable-rate pixel clockSANDSTROEM TORBJOERN·Filed 2010·Granted Jun 25, 2013·0 cites·18 claims
- 0955US8570613B2Lithographic printing system with placement correctionsSANDSTROEM TORBJOERN·Filed 2010·Granted Oct 29, 2013·0 cites·20 claims
- 1046US8456613B2Method and apparatus for quantification of illumination non-uniformity in the mask plane of a lithographic exposure systemSANDSTROEM TORBJOERN·Filed 2008·Granted Jun 4, 2013·0 cites·29 claims
- 1138US8057971B2Method of compensation for bleaching of resist during three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 15, 2011·0 cites·21 claims
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