Assignee

SANKARAKRISHNAN RAMPRAKASH

US·2 granted patents·4 citations·filing 2011–2012

Technology mixC23C2 B08B1 F16K1 H01J1 H01L1 H05H1

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2 records

0176US8778813B2Confined process volume PECVD chamberSANKARAKRISHNAN RAMPRAKASH·Filed 2011·Granted Jul 15, 2014·4 cites·17 claims
0266US8591699B2Method and system for supplying a cleaning gas into a process chamberSANKARAKRISHNAN RAMPRAKASH·Filed 2012·Granted Nov 26, 2013·0 cites·20 claims

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