Assignee
SANT SANKET
US·3 granted patents·22 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0190US8598041B2Method for positioning spacers in pitch multiplicationSANT SANKET·Filed 2012·Granted Dec 3, 2013·8 cites·22 claims
- 0287US8173550B2Method for positioning spacers for pitch multiplicationSANT SANKET·Filed 2011·Granted May 8, 2012·5 cites·20 claims
- 0380US8232538B2Method and apparatus of halogen removal using optimal ozone and UV exposureSANT SANKET·Filed 2009·Granted Jul 31, 2012·9 cites·20 claims
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