Assignee

SARKAR NILADRI

CA·1 granted patent·5 citations·filing 2009–2009

Technology mixF03G1 G01Q1 H02N1

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0171US8402561B2MEMS actuator device with integrated temperature sensorsSARKAR NILADRI·Filed 2009·Granted Mar 19, 2013·5 cites·19 claims

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